| Paper: | WP.L5.2 |
| Session: | Inverse Methods and Reconstruction |
| Session Time: | Wednesday, September 29, 14:45 - 17:55 |
| Presentation Time: | Wednesday, September 29, 15:05 - 15:25 |
| Presentation Type: |
Lecture
|
| Paper Title: |
STOCHASTIC GRADIENT DESCENT FOR ROBUST INVERSE PHOTOMASK SYNTHESIS IN OPTICAL LITHOGRAPHY |
| Authors: |
Ningning Jia; University of Hong Kong | | |
| | Edmund Lam; University of Hong Kong | | |
